PDB single

Record Info

 

Participant Info

Participant details

instrumentation

Microscopes, Sample preparation, Analysis tools, Special detectors

Instrument Name
Strata 400S Dual Beam FIB
Manufacturer
FEI
Special Detectors
STEM, TLD
Instrument Photo
Instrument Description

The Strata 400 STEM Dual-Beam system is a fully digital field emission scanning electron microscope (FEG-SEM) equipped with FIB technology and a Flipstage-STEM assembly. It provides for complete in-situ sample preparation and high-resolution analysis. The key enabling technologies are all integrated onto a single platform such as:

Ultra-high resolution electron optics (magnetic immersion lens with ultra-high brightness Sirion emitter) with SE and BSE in-lens detection and STEM imaging.

High-resolution (field emission) Ion Optics (Sidewinderâ„¢ column).

Advanced control of Gas Chemistries including Delineation Etch, Metal Etch, C Deposition, Pt Deposition, SiO2Deposition, and Au Deposition.

High-precision piezo specimen stage with 100 mm travel along the x and y axes, and integrated loadlock.

Omniprobe 200 sample extraction system for lift-out TEM specimen preparation.

Flipstage pivoting TEM grid mount.

Retractable, multi-region STEM detector (including HAADF)

A high-resolution 4k digital patterning engine.

Automation with full access to e-beam, I-beam, patterning and gas chemistry functionality.

The system architecture is optimized for automation, which is includes AutoFIB, AutoTEM, AutoSlice and View, and the ability to develop custom-made routines for specific application needs.

Lab Details

Details of the the labs and how to contact them

Lab name
FIB
Lab details
FIB
Lab location
Zisafel building, Technion

Contact details

Contact person
Tzipi Cohen Hyams
Contact email
tzipic AT technion.ac.il
Contact phone
972-48295144
Contact mobile
972-545726659
Contact fax
97248295125